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magnetron sputtering

  • Magnetron Sputtering Deposition System (Confocal)
  • Magnetron Sputtering Deposition System (Confocal)
  • Magnetron Sputtering Deposition System (Confocal)
Magnetron Sputtering Deposition System (Confocal)Magnetron Sputtering Deposition System (Confocal)Magnetron Sputtering Deposition System (Confocal)

Magnetron Sputtering Deposition System (Confocal)

  • Metal film
  • Semiconductor film
  • Oxide film
  • Complex component film
  • Product description: Magneton Sputtering Deposition System, versatile tool for metal, semiconductor, oxide film deposition
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Configuration:

1 up to 8 sputtering guns

2 2~6" substrate

3 Substrate: rotation, heating, bias

4 10-7 to 10-9 Torr ultimate base pressure

5 Customized gas lines

6 Fully Automation